Advanced setup, control and diagnostic capabilities to simplify and reduce the risk of operation by automating many manual functions.

The upgrade is applicable to any 445x model Perkin Elmer Sputtering systems having the original manual interface panel consisting of independent key switches and dials. As the upgrade is fairly complex, the system needs to be sent to Instrusoft.

Key Features

Setup

• 32 analog inputs
• 11 analog outouts
• 48 digital inputs
• 48 digital outputs
• 9 data storage parameters
• LN2 use
• 4 Pump down setpoints
• Etch and Target shunt and series setpoints and positions
• Process Chamber table rotation and height parameters
• Recipe entry
• 3 RF parameters
• 3MFC parameters
• 10 Vent parameters

Control

• Up to 5 levels of user passwords for limited access to system parameters
• Main menu screen allows easy access to login, administrative, operation, recipe, data and system control parameters
• Load Lock screen displays real time load lock gauge readings and access to various setup parameters
• Process Chamber screen displays real time process chamber gauge readings and access to various setup parameters
• Operation screen provides an operator level access to run recipes, system control and display relevant parameters to the process

Diagnostics

• Event logging of user clicked events
• Data logging of process events
• PM logging of target and shield usage